태양광 웨이퍼 핸들링
PV-Linearbahn  

Photovoltaic Wafer-Linear-Module

Our wafer handling systems using the ultrasound air bearing can be applied in any atmospheric process. The ultrasound air bearing generates a supporting gas-film (air or process-gas) between its surface and the substrate. Thus, any mechanical contact is avoided. The substrate is hovering on the supporting gas film.

 

Linear Track in Solar Cell Production Application

The substrate is hovering at a height of 200 - 500 μm. In a special setup the height can be increased up to 5 mm or more. The non-contact linear tracks facilitate the smooth and friction free transport of substrates.

The track is titled by 5 - 10°. A lateral feeder (conveyor belt) is positioned at the lower side. The substrate contacts the belt only with one edge. The forces on the edge are very small.

 

Double-Sided Inspection of Substrates

There are two approaches to realize a double side inspection of substrates:

Intersection of the transfer system

with a gap up to 20 mm. This gap can easily be crossed by the substrates while the inspection can be done through this gap (e.g. by optical sensors, line cameras).

Using glass as material of the transfer systems

The substrate can be inspected by optical means through the glass.

 
기술데이터
Electrical Equipment max.50 W, 230 V (ultrasound)
20 W, 24 V (drives)
Distance (tool-substrate) 200 - 500 μm (Spezialkonfiguration ~5 mm)
Cycle Time 1 wafer/s (1 s/wafer)
Interfaces available PROFIBUS, PROFINET, EtherCAT, OPC
Track Width 6,38
Track Length 6,38 - 39,69
Surface materials available anodized aluminium, teflon coating
 
제품장점
  • Lowest breakage rate (<70 ppm)
  • Low energy consumption
  • Modular design
응용분야
  • Linear transport of substrates
  • Substrate Inspection (e.g. line cameras)
중점정보
  • 1 wafer/s (1 s/wafer)
  • Non mechanical contact between the tool and the substrate
  • Double-Sided Inspection
같이 사용할수 있는 제품
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